CUED Publications database

Sensors based on thin film bulk acoustic wave resonators: From fabrication to applications in chemical and biological analysis

Demiquel-Ramos, M and Rughoobur, G and Rajabalina, N and Hamzehlou, S and Escolano, JM and Iborra, E and Flewitt, AJ (2017) Sensors based on thin film bulk acoustic wave resonators: From fabrication to applications in chemical and biological analysis. In: UNSPECIFIED pp. 1312-1314..

Full text not available from this repository.

Abstract

Thin film bulk acoustic wave resonators (FBARs) have interesting applications in the fields of gas, chemical and biological sensing owing to their high sensitivity and high integration potential. In this work we present the latest advancements in the fabrication of FBARs based on ZnO and AIN. We will show different surface texturing techniques used to fabricate piezoelectric resonators capable of operating in the shear mode that suffer low attenuation when analyzing liquid samples. We will highlight some examples of the integration of transparent FBARs. Finally, we will present the results of experiments using the devices for chemical and biological sensing applications.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 27 Nov 2018 01:40
Last Modified: 15 Apr 2021 06:05
DOI: