CUED Publications database

Shock reliability enhancement for MEMS vibration energy harvesters with nonlinear air damping as a soft stopper

Chen, ST and Du, S and Arroyo, E and Jia, Y and Seshia, A (2017) Shock reliability enhancement for MEMS vibration energy harvesters with nonlinear air damping as a soft stopper. Journal of Micromechanics and Microengineering, 27. ISSN 0960-1317

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Abstract

This paper presents a novel application of utilising nonlinear air damping as a soft mechanical stopper to increase the shock reliability for microelectromechanical systems (MEMS) vibration energy harvesters. The theoretical framework for nonlinear air damping is constructed for MEMS vibration energy harvesters operating in different air pressure levels, and characterisation experiments are conducted to establish the relationship between air pressure and nonlinear air damping coefficient for rectangular cantilever MEMS micro cantilevers with different proof masses. Design guidelines on choosing the optimal air pressure level for different MEMS vibration energy harvesters based on the trade-off between harvestable energy and the device robustness are presented, and random excitation experiments are performed to verify the robustness of MEMS vibration energy harvesters with nonlinear air damping as soft stoppers to limit the maximum deflection distance and increase the shock reliability of the device.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 05 Jan 2019 20:08
Last Modified: 10 Apr 2021 00:21
DOI: 10.1088/1361-6439/aa82ed