CUED Publications database

Effects of substrate temperature on diamond films prepared by DC arc plasma jet CVD method

Zhong, G and Shen, F and Tang, W and Lu, F (1999) Effects of substrate temperature on diamond films prepared by DC arc plasma jet CVD method. Beijing Keji Daxue Xuebao/Journal of University of Science and Technology Beijing, 21. pp. 353-356. ISSN 1001-053X

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Abstract

The effects of substrate temperature on the growth rate and quality of diamond films by DC arc plasmajet method were studied. It was found that the growth rate and crystallinity of diamond films increased monotonically with the increase of substrate temperature. However, when the substrate temperature increased from 800°C to 1200°C the content of non-diamond carbon co-deposited in the diamond films decreased first, and then increased rapidly after reaching a minimum at 1000-1100°C.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronic Devices & Materials
Depositing User: Cron Job
Date Deposited: 24 Jan 2019 02:13
Last Modified: 21 Mar 2019 02:01
DOI: