CUED Publications database

Effects of process temperature in the high speed, mask-less, precision laser deposition of micro-tungsten tracks on silicon, copper and stainless-steel

Ten, JS and Sparkes, M and O'Neill, W (2017) Effects of process temperature in the high speed, mask-less, precision laser deposition of micro-tungsten tracks on silicon, copper and stainless-steel. In: UNSPECIFIED pp. 501-502..

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Abstract

Pyrolytic laser-induced chemical vapour deposition is a technique that achieves rapid (volumetric deposition rate up to 3900 μm s ), mask-less deposition of metal and ceramics on numerous substrates such as steel, fused silica, silicon and polymers. The technique can be used for a range of applications one example being writing conductive micro-tracks for the construction of nano- and micro-devices. In pyrolytic laser-induced chemical vapour depositions, the process temperature affects the geometry, purity, microstructure and resistivity of the deposited track and the integrity of the underlying substrate. In this paper, tungsten micro-tracks are deposited from tungsten hexacarbonyl precursors using a 405 nm diode laser on substrates such as silicon, copper and stainless-steel. The average substrate temperature during the process was measured using an infrared thermometer; the peak temperature and temperature distribution around the laser spot were estimated using a numerical heat transfer model. This paper reports the effects of the temperature on the width, height, elemental composition, microstructure and resistivity of the laser-deposited tungsten micro-tracks and the integrity of the underlying substrates. 3 -1

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 30 Jan 2019 21:29
Last Modified: 13 Apr 2021 08:46
DOI: