CUED Publications database

Large-scale nanometer-thickness graphite films synthesized on polycrystalline Ni foils by two-stage chemical vapor deposition process

Hu, Q and Kim, SG and Shin, DW and Kim, TS and Nam, KB and Kim, MJ and Chun, HC and Yoo, JB (2017) Large-scale nanometer-thickness graphite films synthesized on polycrystalline Ni foils by two-stage chemical vapor deposition process. Carbon, 113. pp. 309-317. ISSN 0008-6223

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Abstract

In this work, large-scale (120 × 120 mm) nanometer-thick graphite films (NGFs) were synthesized on polycrystalline Ni foils using a “two-stage” chemical vapor deposition (CVD) process. An intermediate cooling process was included in the CVD process; this process affected the isothermal graphene growth, which is explained using a growth model. We mainly studied a graphite film with the thickness of ∼40 nm and the good thickness uniformity was characterized by atomic force microscopy (AFM), Raman spectroscopy and extreme ultraviolet (EUV) mapping. The graphite formed on the Ni grain boundary was analyzed by transmission electron microscopy (TEM). The relationships between the thickness, optical and electrical properties of the NGF and growth temperature were also studied.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 18 Mar 2019 20:05
Last Modified: 10 Apr 2021 01:11
DOI: 10.1016/j.carbon.2016.11.068