CUED Publications database

A study of the RESURF principle for thin epitaxial layer high voltage integrated circuits

Narayanan, EMS and Amaratunga, G and Milne, WI (1992) A study of the RESURF principle for thin epitaxial layer high voltage integrated circuits. In: UNSPECIFIED pp. 172-175..

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Abstract

In this paper, a comprehensive study of the RESURF principle is presented with a particular emphasis on thin layer high voltage devices. The impact of various parameters on the breakdown behaviour of lateral power devices is examined with the use of a lateral diode structure and a quasi three dimensional numerical simulator. The influence of buried layers on avalanche breakdown voltage behaviour of RESURF devices is also discussed in this paper.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron Job
Date Deposited: 27 Sep 2019 20:50
Last Modified: 15 Apr 2021 06:17
DOI: 10.1109/ISPSD.1992.991258