CUED Publications database

Deposition of tetrahedral hydrogenated amorphous carbon using a novel electron cyclotron wave resonance reactor

Weiler, M and Lang, K and Li, E and Robertson, J (1998) Deposition of tetrahedral hydrogenated amorphous carbon using a novel electron cyclotron wave resonance reactor. APPL PHYS LETT, 72. pp. 1314-1316. ISSN 0003-6951

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Item Type: Article
Uncontrolled Keywords: A-C-H DIAMOND PLASMAS FILMS
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:05
Last Modified: 30 Mar 2015 01:33
DOI: