CUED Publications database

Deposition of tetrahedral hydrogenated amorphous carbon using a novel electron cyclotron wave resonance reactor

Weiler, M and Lang, K and Li, E and Robertson, J (1998) Deposition of tetrahedral hydrogenated amorphous carbon using a novel electron cyclotron wave resonance reactor. APPL PHYS LETT, 72. pp. 1314-1316. ISSN 0003-6951

Full text not available from this repository.
Item Type: Article
Uncontrolled Keywords: A-C-H DIAMOND PLASMAS FILMS
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 09 Dec 2016 17:25
Last Modified: 29 Apr 2017 02:09
DOI: