CUED Publications database

Real time resistometric depth monitoring in the focused ion beam

Latif, A and Booij, WE and Durrell, JH and Blamire, MG (2000) Real time resistometric depth monitoring in the focused ion beam. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 18. pp. 761-764. ISSN 1071-1023

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:38
Last Modified: 20 May 2013 01:33
DOI: 10.1116/1.591273

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