CUED Publications database

Integrating vertically aligned carbon nanotubes on micromechanical structures

Teh, WH and Smith, CG and Teo, KBK and Lacerda, RG and Amaratunga, GAJ and Milne, WI and Castignolles, M and Loiseau, A (2003) Integrating vertically aligned carbon nanotubes on micromechanical structures. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 21. pp. 1380-1383. ISSN 1071-1023

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The integration of high yield, uniform and preferential growth of vertically aligned carbon nanotubes (VACNT) on low stress micromechanical structures was analyzed. A combination of electron-beam crosslinked surface micromachining and direct current plasma enhanced chemical vapor deposition of electric field aligned carbon nanotubes was used for the analysis. The selective placement of high yield and uniform VACNTs on a partially suspended Ni/SiO2/Ti microstructure was also demonstrated.

Item Type: Article
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:05
Last Modified: 18 Feb 2021 15:17
DOI: 10.1116/1.1591743