CUED Publications database

Properties of tetrahedral amorphous carbon deposited by a filtered cathodic vacuum arc

Chhowalla, M and Chen, CW and Kleinsorge, B and Robertson, J and Amaratunga, GAJ and Milne, WI (1996) Properties of tetrahedral amorphous carbon deposited by a filtered cathodic vacuum arc. Materials Research Society Symposium - Proceedings, 423. pp. 299-304. ISSN 0272-9172

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Abstract

The properties of a highly sp3 bonded form of amorphous carbon denoted ta-C deposited from a filtered cathodic vacuum arc (FCVA) are described as a function of ion energy and deposition temperature. The sp3 fraction depends strongly on ion energy and reaches 85% at an ion energy of 100 eV. Other properties such as density and band gap vary in a similar fashion, with the optical gap reaching a maximum of 2.3 eV. These films are very smooth with area roughness of order 1 nm. The sp3 fraction falls suddenly to almost zero for deposition above about 200 °C.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:56
Last Modified: 26 Nov 2014 19:06
DOI: