Lu, CC and Setiadi, D and Udrea, F and Milne, WI and Covington, JA and Gardner, JW (2000) 3D thermo-electro-mechanical simulations of gas sensors based on SOI membranes. 2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000. pp. 297-300.
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Subjects: | UNSPECIFIED |
| Divisions: | Div B > Solid State Electronics and Nanoscale Science Div B > Electronics, Power & Energy Conversion |
| Depositing User: | Cron Job |
| Date Deposited: | 17 Jul 2017 19:39 |
| Last Modified: | 18 Jul 2017 09:49 |
| DOI: |
