Lu, CC and Setiadi, D and Udrea, F and Milne, WI and Covington, JA and Gardner, JW (2000) 3D thermo-electro-mechanical simulations of gas sensors based on SOI membranes. 2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000. pp. 297-300.
Full text not available from this repository.Abstract
3D thermo-electro-mechanical device simulations are presented of a novel fully CMOS-compatible MOSFET gas sensor operating in a SOI membrane. A comprehensive stress analysis of a Si-SiO 2 -based multilayer membrane has been performed to ensure a high degree of mechanical reliability at a high operating temperature (e.g. up to 400°C). Moreover, optimisation of the layout dimensions of the SOI membrane, in particular the aspect ratio between the membrane length and membrane thickness, has been carried out to find the best trade-off between minimal device power consumption and acceptable mechanical stress.
Item Type: | Article |
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Subjects: | UNSPECIFIED |
Divisions: | Div B > Solid State Electronics and Nanoscale Science Div B > Electronics, Power & Energy Conversion |
Depositing User: | Cron Job |
Date Deposited: | 17 Jul 2017 19:39 |
Last Modified: | 03 Aug 2017 03:11 |
DOI: |