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Design and coupled-effect simulations of CMOS micro gas-sensors built on SOI thin membranes

Lu, C-C and Udrea, F and Gardner, JW and Setiadi, D and Dogaru, T and Tsai, TH and Covington, JA (2001) Design and coupled-effect simulations of CMOS micro gas-sensors built on SOI thin membranes. Proceedings of SPIE - The International Society for Optical Engineering, 4408. pp. 86-95. ISSN 0277-786X

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:56
Last Modified: 10 Mar 2014 16:33
DOI:

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