CUED Publications database

Design and coupled-effect simulations of CMOS micro gas-sensors built on SOI thin membranes

Lu, CC and Udrea, F and Gardner, JW and Setiadi, D and Dogaru, T and Tsai, TH and Covington, JA (2001) Design and coupled-effect simulations of CMOS micro gas-sensors built on SOI thin membranes. Proceedings of SPIE - The International Society for Optical Engineering, 4408. pp. 86-95. ISSN 0277-786X

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This paper describes coupled-effect simulations of smart micro gas-sensors based on standard BiCMOS technology. The smart sensor features very low power consumption, high sensitivity and potential low fabrication cost achieved through full CMOS integration. For the first time the micro heaters are made of active CMOS elements (i.e. MOSFET transistors) and embedded in a thin SOI membrane consisting of Si and SiO2 thin layers. Micro gas-sensors such as chemoresistive, microcalorimeteric and Pd/polymer gate FET sensors can be made using this technology. Full numerical analyses including 3D electro-thermo-mechanical simulations, in particular stress and deflection studies on the SOI membranes are presented. The transducer circuit design and the post-CMOS fabrication process, which includes single sided back-etching, are also reported.

Item Type: Article
Uncontrolled Keywords: Electro-thermo-mechanical simulations Micro hot-plates SOI technology Solid-state gas-sensors
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:54
Last Modified: 30 Nov 2015 16:59
DOI: 10.1117/12.425340