CUED Publications database

Design and simulations of SOI CMOS micro-hotplate gas sensors

Udrea, F and Gardner, JW and Setiadi, D and Covington, JA and Dogaru, T and Lu, CC and Milne, WI (2001) Design and simulations of SOI CMOS micro-hotplate gas sensors. Sensors and Actuators, B: Chemical, 78. pp. 180-190. ISSN 0925-4005

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Abstract

This paper describes a new generation of integrated solid-state gas-sensors embedded in SOI micro-hotplates. The micro-hotplates lie on a SOI membrane and consist of MOSFET heaters that elevate the operating temperature, through self-heating, of a gas sensitive material. These sensors are fully compatible with SOI CMOS or BiCMOS technologies, offer ultra-low power consumption (under 100 mW), high sensitivity, low noise, low unit cost, reproducibility and reliability through the use of on-chip integration. In addition, the new integrated sensors offer a nearly uniform temperature distribution over the active area at its operating temperatures at up to about 300-350°C. This makes SOI-based gas-sensing devices particularly attractive for use in handheld battery-operated gas monitors. This paper reports on the design of a chemo-resistive gas sensor and proposes for the first time an intelligent SOI membrane microcalorimeter using active micro-FET heaters and temperature sensors. A comprehensive set of numerical and analogue simulations is also presented including complex 2D and 3D electro-thermal numerical analyses. © 2001 Elsevier Science B.V. All rights reserved.

Item Type: Article
Uncontrolled Keywords: Design Simulations SOI CMOS
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:28
Last Modified: 16 Dec 2014 19:05
DOI: 10.1016/S0925-4005(01)00810-3