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Multi-field simulations and characterization of CMOS-MEMS high-temperature smart gas sensors based on SOI technology

Lu, C-C and Liao, K-H and Udrea, F and Covington, JA and Gardner, JW (2008) Multi-field simulations and characterization of CMOS-MEMS high-temperature smart gas sensors based on SOI technology. Journal of Micromechanics and Microengineering, 18. ISSN 0960-1317

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:40
Last Modified: 10 Mar 2014 16:33
DOI:

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