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Transduction Dependent Optimization of Electromechanical Parameters for Electrostatically Actuated MEMS/NEMS Resonators

Yan, JZ and Lee, JEY and Seshia, AA (2010) Transduction Dependent Optimization of Electromechanical Parameters for Electrostatically Actuated MEMS/NEMS Resonators. In: UNSPECIFIED pp. 7533-7536..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: Resonators Transduction Dependent Optimization Electrostatic Actuation
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:12
Last Modified: 26 Jul 2015 00:07
DOI: 10.1166/jnn.2010.2801