Acquaviva, D and Arun, A and Esconjauregui, S and Bouvet, D and Robertson, J and Smajda, R and Magrez, A and Magrez, A and Forro, L and Ionescu, AM (2010) Capacitive nanoelectromechanical switch based on suspended carbon nanotube array. Applied Physics Letters, 97. ISSN 0003-6951Full text not available from this repository.
We present the fabrication and high frequency characterization of a capacitive nanoelectromechanical system (NEMS) switch using a dense array of horizontally aligned single-wall carbon nanotubes (CNTs). The nanotubes are directly grown onto metal layers with prepatterned catalysts with horizontal alignment in the gas flow direction. Subsequent wetting-induced compaction by isopropanol increases the nanotube density by one order of magnitude. The actuation voltage of 6 V is low for a NEMS device, and corresponds to CNT arrays with an equivalent Young's modulus of 4.5-8.5 GPa, and resistivity of under 0.0077 Ω·cm. The high frequency characterization shows an isolation of -10 dB at 5 GHz. © 2010 American Institute of Physics.
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