CUED Publications database

Development of all metal electrothermal actuator and its applications

Luo, JK and He, JH and Flewitt, A and Moore, DF and Spearing, SM and Fleck, NA and Milne, WI (2005) Development of all metal electrothermal actuator and its applications. Journal of Microlithography, Microfabrication and Microsystems, 4. pp. 1-9. ISSN 1537-1646

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:15
Last Modified: 25 Jul 2017 06:27
DOI: