CUED Publications database

Development of all metal electrothermal actuator and its applications

Luo, J and He, JH and Flewitt, A and Moore, DF and Spearing, SM and Fleck, NA and Milne, WI (2005) Development of all metal electrothermal actuator and its applications. Journal of Microlithography, Microfabrication and Microsystems, 4. pp. 1-9. ISSN 1537-1646

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:53
Last Modified: 06 Oct 2014 01:23
DOI:

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