CUED Publications database

Development of all metal electrothermal actuator and its applications

Luo, J and He, JH and Flewitt, A and Moore, DF and Spearing, SM and Fleck, NA and Milne, WI (2005) Development of all metal electrothermal actuator and its applications. Journal of Microlithography, Microfabrication and Microsystems, 4. pp. 1-9. ISSN 1537-1646

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 20 Dec 2011 12:10
Last Modified: 20 May 2013 01:37
DOI:

Actions (login required)

View Item