CUED Publications database

Microgripper using a diamond like carbon/metal bilayer

Luo, JK and He, JH and Flewitt, AJ and Spearing, SM and Fleck, NA and Milne, WI (2004) Microgripper using a diamond like carbon/metal bilayer. In: UNSPECIFIED pp. 283-286..

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Abstract

A novel normally closed microcage has been fabricated and characterized. This device was made from a highly compressively stressed diamond like carbon (DLC) and electroplated Ni bimorph structure. The large stress in the DLC causes the bimorph layer to curve once it is released from the substrate. The radius of curvature is in the range of 18 - 50μm, and can be controlled by varying the DLC and the Ni thicknesses. The devices can be operated in a pulsed mode current with low operation temperature, and can be opened by ∼60μm laterally with a power consumption of only ∼16mW. © 2004 IEEE.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:52
Last Modified: 26 Nov 2014 19:06
DOI: