Milne, WI and Luo, JK and Huang, R and He, JH and Fu, YQ and Flewitt, AJ and Spearing, SM and Fleck, NA (2005) Normally closed microgrippers based on diamond-like carbon/Ni bimorph and diamond-like carbon/metal/polymer trimorph structures. In: UNSPECIFIED pp. 1981-1984..Full text not available from this repository.
Multi-finger, normally-closed microgrippers made from a bilayer of a metal and diamond-like carbon (DLC) or a trilayer of a polymer, metal and DLC have been analysed, simulated and fabricated. Temperatures of ∼700 K are necessary to open Ni/DLC bimorph structures. Microgrippers made from an SU8/DLC bilayer or SU8/Al/DLC trilayer have also been fabricated, and fully closed microcages with diameters of ∑40 μm have been obtained. Using SU8 reduces the opening temperature of these devices to only ∼400 K.
|Item Type:||Conference or Workshop Item (UNSPECIFIED)|
|Divisions:||Div B > Solid State Electronics and Nanoscale Science|
Div C > Materials Engineering
|Depositing User:||Cron Job|
|Date Deposited:||02 Sep 2016 17:49|
|Last Modified:||29 Sep 2016 09:18|