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Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure

Luo, JK and Huang, R and He, JH and Fu, YQ and Flewitt, AJ and Spearing, SM and Fleck, NA and Milne, WI (2006) Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure. Sensors and Actuators A: Physical, 132. pp. 346-353. ISSN 0924-4247

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 20 Dec 2011 12:10
Last Modified: 20 May 2013 01:31
DOI: 10.1016/j.sna.2006.03.004

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