CUED Publications database

Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure

Luo, JK and Huang, R and He, JH and Fu, YQ and Flewitt, AJ and Spearing, SM and Fleck, NA and Milne, WI (2006) Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure. Sensors and Actuators A: Physical, 132. pp. 346-353.

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:11
Last Modified: 23 Nov 2017 04:19
DOI: