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Deposition of carbon nitride films using an electron cyclotron wave resonance plasma source

Rodil, S and Morrison, NA and Milne, WI and Robertson, J and Stolojan, V and Jayawardane, DN (2000) Deposition of carbon nitride films using an electron cyclotron wave resonance plasma source. Diamond and Related Materials, 9. pp. 524-529. ISSN 0925-9635

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:20
Last Modified: 17 Mar 2014 14:29
DOI:

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