CUED Publications database

Chemical sputtering of ta-C: Implications for the deposition of carbon nitride

Morrison, NA and Rodil, SE and Robertson, J and Milne, WI (2001) Chemical sputtering of ta-C: Implications for the deposition of carbon nitride. Journal of Applied Physics, 89. pp. 5754-5759. ISSN 0021-8979

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:21
Last Modified: 06 Oct 2014 01:23
DOI:

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