CUED Publications database

Properties of a-C:H films deposited from a methane electron cyclotron wave resonant plasma

Morrison, NA and William, C and Racine, B and Milne, WI and Martinez, E and Esteve, J and Andujar, JL (2003) Properties of a-C:H films deposited from a methane electron cyclotron wave resonant plasma. Current Applied Physics, 3. pp. 433-437. ISSN 1567-1739

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Abstract

An electron cyclotron wave resonant methane plasma discharge was used for the high rate deposition of hydrogenated amorphous carbon (a-C:H). Deposition rates of up to ∼400 Å/min were obtained over substrates up to 2.5 in. in diameter with a film thickness uniformity of ∼±10%. The deposited films were characterised in terms of their mass density, sp3 and hydrogen contents, C-H bonding, intrinsic stress, scratch resistance and friction properties. The deposited films possessed an average sp3 content, mass density and refractive index of ∼58%, 1.76 g/cm3 and 2.035 respectively.Mechanical characterisation indicated that the films possessed very low steady-state coefficients of friction (ca. 0.06) and a moderate shear strength of ∼141 MPa. Nano-indentation measurements also indicated a hardness and elastic modulus of ∼16.1 and 160 GPa respectively. The critical loads required to induce coating failure were also observed to increase with ion energy as a consequence of the increase in degree of ion mixing at the interface. Furthermore, coating failure under scratch test conditions was observed to take place via fracture within the silicon substrate itself, rather than either in the coating or at the film/substrate interface. © 2003 Elsevier B.V. All rights reserved.

Item Type: Article
Uncontrolled Keywords: DLC ECWR Mechanical properties Plasma beam deposition
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:40
Last Modified: 26 Nov 2014 19:06
DOI: 10.1016/S1567-1739(03)00107-X