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Methane chemistry involved in a low-pressure electron cyclotron wave resonant plasma discharg

Morrison, NA and William, C and Milne, WI (2003) Methane chemistry involved in a low-pressure electron cyclotron wave resonant plasma discharg. Journal of Applied Physics, 94. pp. 7031-7043. ISSN 0021-8979

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:40
Last Modified: 06 Oct 2014 01:23
DOI:

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