CUED Publications database

Nitrogen incorporation into tetrahedral hydrogenated amorphous carbon

Rodil, SE and Morrison, NA and Robertson, J and Milne, WI (1999) Nitrogen incorporation into tetrahedral hydrogenated amorphous carbon. Physica Status Solidi (A) Applied Research, 174. pp. 25-37. ISSN 0031-8965

Full text not available from this repository.


Structural changes induced by the incorporation of nitrogen into ta-C : H films have been studied by Electron Energy Loss Spectroscopy, X-Ray Photoelectron Spectroscopy, Fourier Transformed Infrared Spectroscopy and Ultraviolet-Visible Spectroscopy. ta-C:H films have been synthesised using a low pressure Electron Cyclotron Wave Resonance (ECWR) source which provides a plasma beam with a high degree of ionisation and dissociation. Nitrogen was incorporated by adding N 2 to the C 2 H 2 plasma used for the deposition of ta-C : H films. The N/C atomic ratio in the films rises rapidly until the N 2 /C 2 H 2 gas ratio reaches three, and then increases more gradually, while the deposition rate decreases steeply. Chemical sputtering of the forming films and the formation of molecular nitrogen within the films limit the maximum nitrogen content to about N/C = 0.6. For low nitrogen content the films retain their diamond-like properties, however as N/C atomic ratio increases, a polymeric-like material is formed, with > C=N- structures and terminating C=N and NH groups that decrease the connectivity of the network.

Item Type: Article
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:38
Last Modified: 22 May 2018 06:16