CUED Publications database

ZnO films for surface acoustic wave microfluidic devices

Milne, WI and Du, XY and Fu, YQ and Tan, SC and Luo, JK and Pisana, S and Maeng, S and Kim, SH and Choi, YJ and Lee, DS and Park, NM and Park, J and Ferrari, AC and Flewitt, AJ (2007) ZnO films for surface acoustic wave microfluidic devices. IDW '07 - Proceedings of the 14th International Display Workshops, 2. pp. 1365-1368.

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Abstract

SAW devices were fabricated on c-axis oriented ZnO films grown on Si substrates. Effects of film thickness on the film microstructure and acoustic frequencies were studied. Both Rayleigh and Sezawa mode waves were detected on the devices, and their resonant frequencies were found to decrease with increase in film thickness.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:50
Last Modified: 08 Dec 2014 02:45
DOI: