CUED Publications database

Effects of mechanical and electrical coupling on the parametric sensitivity of mode localized sensors

Thiruvenkatanathan, P and Yan, J and Woodhouse, J and Aziz, A and Seshia, AA (2009) Effects of mechanical and electrical coupling on the parametric sensitivity of mode localized sensors. In: UNSPECIFIED.

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Abstract

We compare and contrast the effects of two distinctly different mechanisms of coupling (mechanical and electrical) on the parametric sensitivity of micromechanical sensors utilizing mode localization for sensor applications. For the first time, the strong correlation between mode localization and the phenomenon of 'eigenvalue loci-veering' is exploited for accurate quantification of the strength of internal coupling in mode localized sensors. The effects of capacitive coupling-spring tuning on the parametric sensitivity of electrically coupled resonators utilizing this sensing paradigm is also investigated and a mass sensor with sensitivity tunable by over 400% is realized. ©2009 IEEE.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: Eigenvalue curve veering Microelectromechanical resonant sensors Mode localization Sensitivity enhancement
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:10
Last Modified: 26 Nov 2014 08:45
DOI: 10.1109/ULTSYM.2009.5441687