CUED Publications database

Ultra-high density carbon nanotubes on Al-Cu for advanced vias

Dijon, J and Okuno, H and Fayolle, M and Vo, T and Pontcharra, J and Acquaviva, D and Bouvet, D and Ionescu, AM and Esconjauregui, CS and Capraro, B and Quesnel, E and Robertson, J (2010) Ultra-high density carbon nanotubes on Al-Cu for advanced vias. Technical Digest - International Electron Devices Meeting, IEDM. ISSN 0163-1918

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Abstract

An integration scheme for carbon nanotube via interconnects is described to produce nanotube densities of 2.5 1012 tubes/cm2 or 8 1012 walls/cm2 on metallic Al-Cu lines, an order of magnitude beyond the previous state of art, and, for first time, close to that needed for implementation. ©2010 Crown.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:43
Last Modified: 09 Jul 2019 02:55
DOI: 10.1109/IEDM.2010.5703470