CUED Publications database

Ultra-high density carbon nanotubes on Al-Cu for advanced vias

Dijon, J and Okuno, H and Fayolle, M and Vo, T and Pontcharra, J and Acquaviva, D and Bouvet, D and Ionescu, AM and Esconjauregui, CS and Capraro, B and Quesnel, E and Robertson, J (2010) Ultra-high density carbon nanotubes on Al-Cu for advanced vias. Technical Digest - International Electron Devices Meeting, IEDM. ISSN 0163-1918

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An integration scheme for carbon nanotube via interconnects is described to produce nanotube densities of 2.5 10 tubes/cm or 8 10 walls/cm on metallic Al-Cu lines, an order of magnitude beyond the previous state of art, and, for first time, close to that needed for implementation. ©2010 Crown. 12 2 12 2

Item Type: Article
Divisions: Div B > Solid State Electronics and Nanoscale Science
Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:43
Last Modified: 08 Apr 2021 06:57
DOI: 10.1109/IEDM.2010.5703470