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FORMATION OF CRYSTALLINE SILICON LAYERS FOR 3-DIMENSIONAL INTEGRATED-CIRCUITS USING DUAL ELECTRON-BEAM RECRYSTALLIZATION

MCMAHON, RA and HASKO, DG and WALLEY, SM and AHMED, H and BARFOOT, KM and HOPPER, GF and GODFREY, DJ (1986) FORMATION OF CRYSTALLINE SILICON LAYERS FOR 3-DIMENSIONAL INTEGRATED-CIRCUITS USING DUAL ELECTRON-BEAM RECRYSTALLIZATION. J ELECTROCHEM SOC, 133. C95-C95. ISSN 0013-4651

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:58
Last Modified: 20 Oct 2014 17:49
DOI:

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