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FORMATION OF CRYSTALLINE SILICON LAYERS FOR 3-DIMENSIONAL INTEGRATED-CIRCUITS USING DUAL ELECTRON-BEAM RECRYSTALLIZATION

MCMAHON, RA and HASKO, DG and WALLEY, SM and AHMED, H and BARFOOT, KM and HOPPER, GF and GODFREY, DJ (1986) FORMATION OF CRYSTALLINE SILICON LAYERS FOR 3-DIMENSIONAL INTEGRATED-CIRCUITS USING DUAL ELECTRON-BEAM RECRYSTALLIZATION. J ELECTROCHEM SOC, 133. C95-C95. ISSN 0013-4651

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 16:46
Last Modified: 01 Dec 2016 09:14
DOI: