MCMAHON, RA and HASKO, DG and WALLEY, SM and AHMED, H and BARFOOT, KM and HOPPER, GF and GODFREY, DJ (1986) FORMATION OF CRYSTALLINE SILICON LAYERS FOR 3-DIMENSIONAL INTEGRATED-CIRCUITS USING DUAL ELECTRON-BEAM RECRYSTALLIZATION. J ELECTROCHEM SOC, 133. C95-C95. ISSN 0013-4651
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Subjects: | UNSPECIFIED |
| Divisions: | Div B > Electronics, Power & Energy Conversion |
| Depositing User: | Cron Job |
| Date Deposited: | 11 Nov 2011 10:24 |
| Last Modified: | 14 May 2012 01:26 |
| DOI: |
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