CUED Publications database

A resonant micromachined electrostatic charge sensor

Zhu, Y and Lee, JEY and Seshia, AA (2008) A resonant micromachined electrostatic charge sensor. IEEE Sensors Journal, 8. pp. 1499-1505. ISSN 1530-437X

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:38
Last Modified: 25 Jul 2017 06:26
DOI: