Lee, JE-Y and Zhu, Y and Seshia, AA (2008) A bulk acoustic mode single-crystal silicon microresonator with a high-quality factor. Journal of Micromechanics and Microengineering, 18. ISSN 0960-1317
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Subjects: | UNSPECIFIED |
| Divisions: | Div C > Materials Engineering |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 17:07 |
| Last Modified: | 20 May 2013 01:35 |
| DOI: |
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