CUED Publications database

A bulk acoustic mode single-crystal silicon microresonator with a high-quality factor

Lee, JE-Y and Zhu, Y and Seshia, AA (2008) A bulk acoustic mode single-crystal silicon microresonator with a high-quality factor. Journal of Micromechanics and Microengineering, 18. ISSN 0960-1317

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:45
Last Modified: 30 Oct 2014 19:05
DOI: