CUED Publications database

A bulk acoustic mode single-crystal silicon microresonator with a high-quality factor

Lee, JE-Y and Zhu, Y and Seshia, AA (2008) A bulk acoustic mode single-crystal silicon microresonator with a high-quality factor. Journal of Micromechanics and Microengineering, 18. ISSN 0960-1317

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Abstract

This paper details a bulk acoustic mode resonator fabricated in single-crystal silicon with a quality factor of 15 000 in air, and over a million below 10 mTorr at a resonant frequency of 2.18 MHz. The resonator is a square plate that is excited in the square-extensional mode and has been fabricated in a commercial foundry silicon-on-insulator (SOI) MEMS process through MEMSCAP. This paper also presents a simple method of extracting resonator parameters from raw measurements heavily buried in electrical feedthrough. Its accuracy has been demonstrated through a comparison between extracted motional resistance values measured at different voltage biases and those predicted from an analytical model. Finally, a method of substantially cancelling electrical feedthrough through system-level electronic implementation is also introduced. © 2008 IOP Publishing Ltd.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:45
Last Modified: 08 Dec 2014 02:23
DOI: 10.1088/0960-1317/18/6/064001