CUED Publications database

Ultrasensitive mass balance based on a bulk acoustic mode single-crystal silicon resonator

Lee, JE-Y and Bahreyni, B and Zhu, Y and Seshia, AA (2007) Ultrasensitive mass balance based on a bulk acoustic mode single-crystal silicon resonator. Applied Physics Letters, 91. ISSN 0003-6951

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Abstract

A single-crystal silicon resonant bulk acoustic mass sensor with a measured resolution of 125 pg cm2 is presented. The mass sensor comprises a micromachined silicon plate that is excited in the square-extensional bulk acoustic resonant mode at a frequency of 2.182 MHz, with a quality factor exceeding 106. The mass sensor has a measured mass to frequency shift sensitivity of 132 Hz cm2 μg. The resonator element is embedded in a feedback loop of an electronic amplifier to implement an oscillator with a short term frequency stability of better than 7 ppb at an operating pressure of 3.8 mTorr. © 2007 American Institute of Physics.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:40
Last Modified: 08 Dec 2014 02:23
DOI: 10.1063/1.2822405