Lee, JEY and Bahreyni, B and Zhu, Y and Seshia, AA (2007) Ultrasensitive mass balance based on a bulk acoustic mode single-crystal silicon resonator. Applied Physics Letters, 91. ISSN 0003-6951Full text not available from this repository.
A single-crystal silicon resonant bulk acoustic mass sensor with a measured resolution of 125 pg cm2 is presented. The mass sensor comprises a micromachined silicon plate that is excited in the square-extensional bulk acoustic resonant mode at a frequency of 2.182 MHz, with a quality factor exceeding 106. The mass sensor has a measured mass to frequency shift sensitivity of 132 Hz cm2 μg. The resonator element is embedded in a feedback loop of an electronic amplifier to implement an oscillator with a short term frequency stability of better than 7 ppb at an operating pressure of 3.8 mTorr. © 2007 American Institute of Physics.
|Divisions:||Div C > Applied Mechanics|
|Depositing User:||Cron Job|
|Date Deposited:||09 Dec 2016 17:17|
|Last Modified:||22 Feb 2017 00:05|