Lee, JE-Y and Seshia, AA (2010) Direct parameter extraction in capacitively transduced micromechanical resonators using the anti-resonance. 2010 IEEE International Frequency Control Symposium, FCS 2010. pp. 133-136.Full text not available from this repository.
This paper presents a method for the fast and direct extraction of model parameters for capacitive MEMS resonators from their measured transmission response such as quality factor, resonant frequency, and motional resistance. We show that these parameters may be extracted without having to first de-embed the resonator motional current from the feedthrough. The series and parallel resonances from the measured electrical transmission are used to determine the MEMS resonator circuit parameters. The theoretical basis for the method is elucidated by using both the Nyquist and susceptance frequency response plots, and applicable in the limit where CF > CmQ; commonly the case when characterizing MEMS resonators at RF. The method is then applied to the measured electrical transmission for capacitively transduced MEMS resonators, and compared against parameters obtained using a Lorentzian fit to the measured response. Close agreement between the two methods is reported herein. © 2010 IEEE.
|Divisions:||Div C > Applied Mechanics|
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|Date Deposited:||16 Jul 2015 13:12|
|Last Modified:||26 Jul 2015 00:06|