Lin, AT-H and Lee, JE-Y and Yan, J and Seshia, AA (2009) Enhanced transduction methods for electrostatically driven MEMS resonators. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. pp. 561-564.Full text not available from this repository.
Electrically addressed silicon bulk acoustic wave microresonators offer high Q solutions for applications in sensing and signal processing. However, the electrically transduced motional signal is often swamped by parasitic feedthrough in hybrid technologies. With the aim of enhancing the ratio of the motional to feedthrough current at nominal operating voltages, this paper benchmarks a variety of drive and detection principles for electrostatically driven square-extensional mode resonators operating in air and in a foundry MEMS process utilizing 2μm gaps. A new detection technique, combining second harmonic capacitive actuation and piezoresistive detection, outperforms previously reported methods utilizing voltages as low as ± 3V in air providing a promising solution for low voltage CMOS-MEMS integration. ©2009 IEEE.
|Uncontrolled Keywords:||BAW resonator Harmonic driving Piezoresistive sensing|
|Divisions:||Div C > Applied Mechanics|
Div D > Geotechnical and Environmental
|Depositing User:||Cron job|
|Date Deposited:||04 Feb 2015 23:02|
|Last Modified:||05 Feb 2015 08:30|