CUED Publications database

Enhanced transduction methods for electrostatically driven MEMS resonators

Lin, ATH and Lee, JEY and Yan, J and Seshia, AA (2009) Enhanced transduction methods for electrostatically driven MEMS resonators. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. pp. 561-564.

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Electrically addressed silicon bulk acoustic wave microresonators offer high Q solutions for applications in sensing and signal processing. However, the electrically transduced motional signal is often swamped by parasitic feedthrough in hybrid technologies. With the aim of enhancing the ratio of the motional to feedthrough current at nominal operating voltages, this paper benchmarks a variety of drive and detection principles for electrostatically driven square-extensional mode resonators operating in air and in a foundry MEMS process utilizing 2μm gaps. A new detection technique, combining second harmonic capacitive actuation and piezoresistive detection, outperforms previously reported methods utilizing voltages as low as ± 3V in air providing a promising solution for low voltage CMOS-MEMS integration. ©2009 IEEE.

Item Type: Article
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:35
Last Modified: 27 Oct 2020 06:22
DOI: 10.1109/SENSOR.2009.5285386