CUED Publications database

Enhanced transduction methods for electrostatically driven MEMS resonators

Lin, AT-H and Lee, JE-Y and Yan, J and Seshia, AA (2009) Enhanced transduction methods for electrostatically driven MEMS resonators. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. pp. 561-564.

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 17:06
Last Modified: 18 Mar 2013 01:07
DOI:

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