Thiruvenkatanathan, P and Yan, J and Lee, JEY and Seshia, AA (2009) Enhancing parametric sensitivity using mode localization in electrically coupled mems resonators. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. pp. 2350-2353.Full text not available from this repository.
We use vibration localization as a sensitive means of detecting small perturbations in stiffness in a pair of weakly coupled micromechanical resonators. For the first time, the variation in the eigenstates is studied by electrostatically coupling nearly identical resonators to allow for stronger localization of vibrational energy due to perturbations in stiffness. Eigenstate variations that are orders of magnitude greater than corresponding shifts in resonant frequency for an induced stiffness perturbation are experimentally demonstrated. Such high, voltagetunable parametric sensitivities together with the added advantage of intrinsic common mode rejection pave the way to a new paradigm of mechanical sensing. ©2009 IEEE.
|Divisions:||Div C > Applied Mechanics|
Div D > Geotechnical and Environmental
|Depositing User:||Unnamed user with email firstname.lastname@example.org|
|Date Deposited:||15 Dec 2015 13:00|
|Last Modified:||13 Feb 2016 22:05|