CUED Publications database

Enhancing parametric sensitivity using mode localization in electrically coupled mems resonators

Thiruvenkatanathan, P and Yan, J and Lee, JE-Y and Seshia, AA (2009) Enhancing parametric sensitivity using mode localization in electrically coupled mems resonators. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. pp. 2350-2353.

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Abstract

We use vibration localization as a sensitive means of detecting small perturbations in stiffness in a pair of weakly coupled micromechanical resonators. For the first time, the variation in the eigenstates is studied by electrostatically coupling nearly identical resonators to allow for stronger localization of vibrational energy due to perturbations in stiffness. Eigenstate variations that are orders of magnitude greater than corresponding shifts in resonant frequency for an induced stiffness perturbation are experimentally demonstrated. Such high, voltagetunable parametric sensitivities together with the added advantage of intrinsic common mode rejection pave the way to a new paradigm of mechanical sensing. ©2009 IEEE.

Item Type: Article
Uncontrolled Keywords: Electrical coupling Mode localization Parametric sensitivity Resonator
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:19
Last Modified: 30 Nov 2014 20:45
DOI: 10.1109/SENSOR.2009.5285444