Lee, JEY and Seshia, AA (2009) Parasitic feedthrough cancellation techniques for enhanced electrical characterization of electrostatic microresonators. Sensors and Actuators, A: Physical, 156. pp. 36-42. ISSN 0924-4247Full text not available from this repository.
Capacitive parasitic feedthrough is an impediment that is inherent to all electrically interfaced micron scale resonant devices, resulting in increased challenges to their integration in more complex circuits, particularly as devices are scaled to operate at higher frequencies for RF applications. In this paper, a technique to cancel the undesirable effects of capacitive feedthrough that was previously proposed is here developed for an on-chip implementation. The method reported in this paper benefits from the simplicity of its implementation, and its effectiveness is demonstrated in this paper. This technique is demonstrated for two disk-plate resonators that have been excited in the wine glass mode at 5.4 MHz, though applicable to almost any electrically interfaced resonator. Measurements of the electrical transmission from these resonators show that the magnitude of the frequency response of the system is enhanced by up to 19 dB, while the phase is found to shift through a full 180° about the resonant frequency. This method is proposed as a useful addition to other techniques for enhancing the measured response of electrostatic micromechanical resonators. © 2009 Elsevier B.V. All rights reserved.
|Divisions:||Div C > Applied Mechanics|
|Depositing User:||Cron Job|
|Date Deposited:||02 Sep 2016 16:20|
|Last Modified:||25 Sep 2016 05:26|