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5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million

Lee, JE-Y and Seshia, AA (2009) 5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million. Sensors and Actuators, A: Physical, 156. pp. 28-35. ISSN 0924-4247

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:24
Last Modified: 21 Apr 2014 01:09
DOI:

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