CUED Publications database

Binary excitation of a high-Q bulk acoustic microresonator by actuation polarity inversion

Lee, JE-Y and Seshia, AA (2009) Binary excitation of a high-Q bulk acoustic microresonator by actuation polarity inversion. In: UNSPECIFIED pp. 443-448..

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Abstract

We present a technique for independently exciting two resonant modes of vibration in a single-crystal silicon bulk mode microresonator using the same electrode configuration through control of the polarity of the DC actuation voltage. Applications of this technique may include built-in temperature compensation by the simultaneous selective excitation of two closely spaced modes that may have different temperature coefficients of resonant frequency. The technique is simple and requires minimum circuit overhead for implementation. The technique is implemented on square plate resonators with quality factors as high as 3.06 × 106. Copyright © 2008 by ASME.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:53
Last Modified: 30 Nov 2014 20:45
DOI: 10.1115/IMECE2008-67695