Lee, JE-Y and Seshia, AA (2009) Binary excitation of a high-Q bulk acoustic microresonator by actuation polarity inversion. In: UNSPECIFIED pp. 443-448..Full text not available from this repository.
We present a technique for independently exciting two resonant modes of vibration in a single-crystal silicon bulk mode microresonator using the same electrode configuration through control of the polarity of the DC actuation voltage. Applications of this technique may include built-in temperature compensation by the simultaneous selective excitation of two closely spaced modes that may have different temperature coefficients of resonant frequency. The technique is simple and requires minimum circuit overhead for implementation. The technique is implemented on square plate resonators with quality factors as high as 3.06 × 106. Copyright © 2008 by ASME.
|Item Type:||Conference or Workshop Item (UNSPECIFIED)|
|Divisions:||Div C > Applied Mechanics|
|Depositing User:||Cron job|
|Date Deposited:||04 Feb 2015 22:23|
|Last Modified:||01 May 2015 19:22|