CUED Publications database

Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator

Lee, JE-Y and Yan, J and Seshia, AA (2009) Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator. Journal of Micromechanics and Microengineering, 19. ISSN 0960-1317

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 17:07
Last Modified: 20 May 2013 01:34
DOI:

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