CUED Publications database

Thin film monitoring with silicon bulk acoustic resonators

Lee, JEY and Bahreyni, B and Seshia, AA (2008) Thin film monitoring with silicon bulk acoustic resonators. In: UNSPECIFIED pp. 581-584..

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Abstract-This paper reports a single-crystal silicon mass sensor based on a square-plate resonant structure excited in the wine glass bulk acoustic mode at a resonant frequency of 2.065 MHz and an impressive quality factor of 4 million at 12 mtorr pressure. Mass loading on the resonator results in a linear downshift in the resonant frequency of this device, wherein the measured sensitivity is found to be 175 Hz cm2/μg. The silicon resonator is embedded in an oscillator feedback loop, which has a short-term frequency stability of 3 mHz (approximately 1.5 ppb) at an operating pressure of 3.2 mtorr, corresponding to an equivalent mass noise floor of 17 pg/cm2. Possible applications of this device include thin film monitoring and gas sensing, with the potential added benefits of scalability and integration with CMOS technology. © 2008 IEEE.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Divisions: Div C > Applied Mechanics
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:12
Last Modified: 25 Nov 2015 11:05
DOI: 10.1109/ICSENS.2008.4716506