CUED Publications database

Thin film monitoring with silicon bulk acoustic resonators

Lee, JE-Y and Bahreyni, B and Seshia, AA (2008) Thin film monitoring with silicon bulk acoustic resonators. In: UNSPECIFIED pp. 581-584..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:15
Last Modified: 27 Oct 2014 01:04
DOI: