CUED Publications database

Anchor limited q in flexural mode resonators

Lee, JEY and Yan, J and Seshia, AA (2008) Anchor limited q in flexural mode resonators. In: UNSPECIFIED pp. 2213-2216..

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This paper reports a preliminary examination of the effect of anchor geometry design on the quality factor of flexural mode resonators operating in vacuum using both FE simulation and measurements of resonator frequency response. Three types of structures have been considered in this study: an elliptical mode ring, a double ended tuning fork, and a doubly-clamped beam. We consider the relative distribution of strain energies in both the resonant structure and the connecting stem, which is indicative of the measured quality factor. The measured quality factors of the different structures are compared against each other, based on which suggestions are proposed for optimizing the anchor limited quality factor (Q) in flexural mode micromechanical resonators. ©2008 IEEE.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Divisions: Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:37
Last Modified: 22 Oct 2020 05:39
DOI: 10.1109/ULTSYM.2008.0548