CUED Publications database

Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

Teo, KBK and Chhowalla, M and Amaratunga, GAJ and Milne, WI and Legagneux, P and Pirio, G and Gangloff, L and Pribat, D and Semet, V and Binh, VT and Bruenger, WH and Eichholz, J and Hanssen, H and Friedrich, D and Lee, SB and Hasko, DG and Ahmed, H (2003) Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 21. pp. 693-697. ISSN 1071-1023

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Abstract

The development of the Nanolith parallel electron-beam writing head was discussed. The fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in the lithographic system were described. The microcathode exhibited a peak current of 10.5 μA at 48 V when operated with a duty cycle of 0.5 percent.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:20
Last Modified: 08 Dec 2014 02:25
DOI: