CUED Publications database

Suspended multiwalled carbon nanotubes as self-aligned evaporation masks

Lee, SB and Robinson, LAW and Teo, KBK and Chhowalla, M and Amaratunga, GAJ and Milne, WI and Hasko, DG and Ahmed, H (2003) Suspended multiwalled carbon nanotubes as self-aligned evaporation masks. Journal of Nanoscience and Nanotechnology, 3. pp. 325-328. ISSN 1533-4880

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We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

Item Type: Article
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:39
Last Modified: 18 Feb 2021 15:27
DOI: 10.1166/jnn.2003.204