Lee, SB and Robinson, LAW and Teo, KBK and Chhowalla, M and Amaratunga, GAJ and Milne, WI and Hasko, DG and Ahmed, H (2003) Suspended multiwalled carbon nanotubes as self-aligned evaporation masks. Journal of Nanoscience and Nanotechnology, 3. pp. 325-328. ISSN 1533-4880Full text not available from this repository.
We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
|Divisions:||Div B > Electronics, Power & Energy Conversion|
Div B > Solid State Electronics and Nanoscale Science
|Depositing User:||Unnamed user with email email@example.com|
|Date Deposited:||18 May 2016 17:59|
|Last Modified:||26 Jun 2016 22:33|