CUED Publications database

Self-aligned electrodes for suspended carbon nanotube structures

Robinson, LAW and Lee, SB and Teo, KBK and Chhowalla, M and Amaratunga, GAJ and Milne, WI and Williams, DA and Hasko, DG and Ahmed, H (2003) Self-aligned electrodes for suspended carbon nanotube structures. Microelectronic Engineering, 67-68. pp. 615-622. ISSN 0167-9317

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We report on a study into electrode fabrication for the gate control of carbon nanotubes partially suspended above an oxidised silicon substrate. A fabrication technique has been developed that allows self-aligned side-gate electrodes to be placed with respect to an individual nanotube with a spacing of less than 10 nm. The suspended multi-walled carbon nanotube (MWCNT) is used as an evaporation mask during metal deposition. The metal forms an island on the nanotube, with increasing width as the metal is deposited, forming a wedge shape, so that even thick deposited layers yield islands that remain separated from the metal deposited on the substrate due to shadowing of the evaporation. The island can be removed during lift-off to leave a set of self-aligned electrodes on the substrate. Results show that Cr yields self-aligned side gates with around 90% effectiveness. © 2003 Elsevier Science B.V. All rights reserved.

Item Type: Article
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:32
Last Modified: 16 Mar 2021 07:29
DOI: 10.1016/S0167-9317(03)00122-9