Fabrication of self-aligned side gates to carbon nanotubes

Robinson, LAW and Lee, SB and Teo, KBK and Chhowalla, M and Amaratunga, GAJ and Milne, WI and Williams, DA and Hasko, DG and Ahmed, H (2003) Fabrication of self-aligned side gates to carbon nanotubes. Nanotechnology, 14. pp. 290-293. ISSN 0957-4484

Abstract

We have fabricated self-aligned, side-gated suspended multi-walled carbon nanotubes (MWCNTs), with nanotube-to-gate spacing of less than 10 nm. Evaporated metal forms an island on a suspended MWCNT, the island and the nanotube act as a mask shielding the substrate, and lift-off then removes the metal island, leaving a set of self-aligned side gates. Al, Cr, Au, and Ti were investigated and the best results were obtained with Cr, at a yield of over 90%.