CUED Publications database

Fabrication of self-aligned side gates to carbon nanotubes

Robinson, LAW and Lee, SB and Teo, KBK and Chhowalla, M and Amaratunga, GAJ and Milne, WI and Williams, DA and Hasko, DG and Ahmed, H (2003) Fabrication of self-aligned side gates to carbon nanotubes. Nanotechnology, 14. pp. 290-293. ISSN 0957-4484

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We have fabricated self-aligned, side-gated suspended multi-walled carbon nanotubes (MWCNTs), with nanotube-to-gate spacing of less than 10 nm. Evaporated metal forms an island on a suspended MWCNT, the island and the nanotube act as a mask shielding the substrate, and lift-off then removes the metal island, leaving a set of self-aligned side gates. Al, Cr, Au, and Ti were investigated and the best results were obtained with Cr, at a yield of over 90%.

Item Type: Article
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:39
Last Modified: 13 Apr 2021 08:02
DOI: 10.1088/0957-4484/14/2/336