Robinson, LAW and Lee, SB and Teo, KBK and Chhowalla, M and Amaratunga, GAJ and Milne, WI and Williams, DA and Hasko, DG and Ahmed, H (2003) Fabrication of self-aligned side gates to carbon nanotubes. Nanotechnology, 14. pp. 290-293. ISSN 0957-4484Full text not available from this repository.
We have fabricated self-aligned, side-gated suspended multi-walled carbon nanotubes (MWCNTs), with nanotube-to-gate spacing of less than 10 nm. Evaporated metal forms an island on a suspended MWCNT, the island and the nanotube act as a mask shielding the substrate, and lift-off then removes the metal island, leaving a set of self-aligned side gates. Al, Cr, Au, and Ti were investigated and the best results were obtained with Cr, at a yield of over 90%.
|Divisions:||Div B > Electronics, Power & Energy Conversion|
Div B > Solid State Electronics and Nanoscale Science
|Depositing User:||Unnamed user with email email@example.com|
|Date Deposited:||09 Dec 2016 18:41|
|Last Modified:||21 Jan 2017 22:29|