Lee, S-B and Robinson, LAW and Teo, KBK and Chhowalla, M and Amaratunga, GAJ and Milne, WI and Hasko, DG and Ahmed, H (2002) Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. Materials Research Society Symposium - Proceedings, 741. pp. 185-190. ISSN 0272-9172Full text not available from this repository.
We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
|Divisions:||Div B > Electronics, Power & Energy Conversion|
Div B > Solid State Electronics and Nanoscale Science
|Depositing User:||Cron Job|
|Date Deposited:||07 Mar 2014 11:54|
|Last Modified:||26 Jan 2015 03:31|