CUED Publications database

Self-aligned split gate electrodes fabricated on suspended carbon nanotubes

Lee, S-B and Robinson, LAW and Teo, KBK and Chhowalla, M and Amaratunga, GAJ and Milne, WI and Hasko, DG and Ahmed, H (2002) Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. Materials Research Society Symposium Proceedings, 761. pp. 97-102. ISSN 0272-9172

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We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems. © 2003 Materials Research Society.

Item Type: Article
Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:03
Last Modified: 30 Mar 2015 01:35