CUED Publications database

Study of lateral mode SOI-MEMS resonators for reduced anchor loss

Lee, JE-Y and Yan, J and Seshia, AA (2011) Study of lateral mode SOI-MEMS resonators for reduced anchor loss. Journal of Micromechanics and Microengineering, 21. ISSN 0960-1317

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Abstract

MEMS resonators fabricated in silicon-on-insulator (SOI) technology must be clamped to the substrate via anchoring stems connected either from within the resonator or through the sides, with the side-clamped solution often employed due to manufacturing constraints. This paper examines the effect of two types of commonly used side-clamped, anchoring-stem geometries on the quality factor of three different laterally-driven resonator topologies. This study employs an analytical framework which considers the relative distribution of strain energies between the resonating body and clamping stems. The ratios of the strain energies are computed using ANSYS FEA and used to provide an indicator of the expected anchor-limited quality factors. Three MEMS resonator topologies have been fabricated and characterized in moderate vacuum. The associated measured quality factors are compared against the computed strain energy ratios, and the trends are shown to agree well with the experimental data. © 2011 IOP Publishing Ltd.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:21
Last Modified: 08 Dec 2014 02:22
DOI: 10.1088/0960-1317/21/4/045010