CUED Publications database

Study of lateral mode SOI-MEMS resonators for reduced anchor loss

Lee, JE-Y and Yan, J and Seshia, AA (2011) Study of lateral mode SOI-MEMS resonators for reduced anchor loss. Journal of Micromechanics and Microengineering, 21. ISSN 0960-1317

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:21
Last Modified: 10 Nov 2014 01:05
DOI: