Lee, JE-Y and Yan, J and Seshia, AA (2011) Study of lateral mode SOI-MEMS resonators for reduced anchor loss. Journal of Micromechanics and Microengineering, 21. ISSN 0960-1317
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Subjects: | UNSPECIFIED |
| Divisions: | Div C > Materials Engineering Div D > Geotechnical and Environmental |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 17:06 |
| Last Modified: | 25 May 2013 18:10 |
| DOI: |
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