CUED Publications database

Fabrication of 25nm wide gold lines using nanometer scale lithography and ionized cluster beam deposition

Huq, SE and Chen, ZW and McMahon, RA and Jones, GAC and Ahmed, H (1990) Fabrication of 25nm wide gold lines using nanometer scale lithography and ionized cluster beam deposition. Microelectronic Engineering, 11. pp. 343-346. ISSN 0167-9317

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:40
Last Modified: 13 Oct 2014 01:18
DOI:

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