Huq, SE and Chen, ZW and McMahon, RA and Jones, GAC and Ahmed, H (1990) Fabrication of 25nm wide gold lines using nanometer scale lithography and ionized cluster beam deposition. Microelectronic Engineering, 11. pp. 343-346. ISSN 0167-9317
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Subjects: | UNSPECIFIED |
| Divisions: | Div B > Electronics, Power & Energy Conversion |
| Depositing User: | Cron Job |
| Date Deposited: | 11 Nov 2011 10:24 |
| Last Modified: | 16 May 2013 19:23 |
| DOI: |
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