CUED Publications database

Fabrication of 25nm wide gold lines using nanometer scale lithography and ionized cluster beam deposition

Huq, SE and Chen, ZW and McMahon, RA and Jones, GAC and Ahmed, H (1990) Fabrication of 25nm wide gold lines using nanometer scale lithography and ionized cluster beam deposition. Microelectronic Engineering, 11. pp. 343-346. ISSN 0167-9317

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:00
Last Modified: 27 Jul 2017 06:41
DOI: