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CHARACTERIZATION OF SI-IMPLANTED AND ELECTRON-BEAM-ANNEALED SILICON-ON-SAPPHIRE USING HIGH-RESOLUTION ELECTRON-MICROSCOPY

SMITH, DJ and FREEMAN, LA and MCMAHON, RA and AHMED, H and PITT, MG and PETERS, TB (1984) CHARACTERIZATION OF SI-IMPLANTED AND ELECTRON-BEAM-ANNEALED SILICON-ON-SAPPHIRE USING HIGH-RESOLUTION ELECTRON-MICROSCOPY. J APPL PHYS, 56. pp. 2207-2212. ISSN 0021-8979

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:24
Last Modified: 01 May 2015 19:23
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