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CHARACTERIZATION OF SI-IMPLANTED AND ELECTRON-BEAM-ANNEALED SILICON-ON-SAPPHIRE USING HIGH-RESOLUTION ELECTRON-MICROSCOPY

SMITH, DJ and FREEMAN, LA and MCMAHON, RA and AHMED, H and PITT, MG and PETERS, TB (1984) CHARACTERIZATION OF SI-IMPLANTED AND ELECTRON-BEAM-ANNEALED SILICON-ON-SAPPHIRE USING HIGH-RESOLUTION ELECTRON-MICROSCOPY. J APPL PHYS, 56. pp. 2207-2212. ISSN 0021-8979

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:42
Last Modified: 10 Mar 2014 18:02
DOI: