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CHARACTERIZATION OF SI-IMPLANTED AND ELECTRON-BEAM-ANNEALED SILICON-ON-SAPPHIRE USING HIGH-RESOLUTION ELECTRON-MICROSCOPY

SMITH, DJ and FREEMAN, LA and MCMAHON, RA and AHMED, H and PITT, MG and PETERS, TB (1984) CHARACTERIZATION OF SI-IMPLANTED AND ELECTRON-BEAM-ANNEALED SILICON-ON-SAPPHIRE USING HIGH-RESOLUTION ELECTRON-MICROSCOPY. J APPL PHYS, 56. pp. 2207-2212. ISSN 0021-8979

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Item Type: Article
Subjects: UNSPECIFIED
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Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:52
Last Modified: 27 Aug 2015 22:27
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